The method of preparing a metal pattern on the surface of the wet etching in conjunction with nanoimprinting

The present invention discloses a method for preparing metal nano patterns on the surface of the platen in conjunction with wet etching. After this first method deposited layer of metal on the surface, and then transferred by means of embossing pattern, reactive ion etching method by carved on the metal layer to the residue to embossed plastic as a mask to etch the metal is base, reactive ion etching and then removing the upper layer of the metal pattern embossed plastic, to obtain a metal pattern. The present invention is simple, alternatively may be held in a plane away from the process for preparing a metal pattern, the ratio of the conventional lift-off process is more difficult to destroy the integrity of the pattern and reduce the occurrence of defects; they may be prepared by preparing a metal pattern on a curved surface, and preparation of the surface pattern on the lift-off process is not possible. The present invention is in the manufacture of fiber Bragg grating, hybrid refractive / diffractive optical element, etc. Field NEMS has broad application prospect.