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HYDROGENATION AND PURIFICATION OF SILICON BY RF PLASMA
HYDROGENATION AND PURIFICATION OF SILICON BY RF PLASMA
2005
Daniel Morvan
A. Soric
M. Benmansour
S. Darwiche
E. Francke
M. Nikravech
Jacques Amouroux
Sergey V. Dresvin
Keywords:
Analytical chemistry
Plasma
Chemistry
Silicon
Metallurgy
Chemical engineering
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