P‐54: Glass Substrate for LTPS‐TFT with Precisely Controlled Thermal Shrinkage

Factors for precise control of thermal shrinkage during LTPS-TFT formation process were investigated. First of all, novel displacement-measurement apparatus with high accuracy was developed. Using this system, thermal shrinkage behavior was evaluated for commercially produced glass sheet. As a result, it was found that the effect of induced stress in glass sheet forming process cannot be negligible for controlling the thermal shrinkage behavior during LTPS-TFT formation process.