Characterization of Crystalline TiC Films Grown by Pulsed Nd:YAG Laser Deposition

Yoshiaki Suda,Hiroharu Kawasaki,Choong-Rae Cho,A.M. Grishin,K V Rao

Characterization of Crystalline TiC Films Grown by Pulsed Nd:YAG Laser Deposition

2000

Yoshiaki Suda
Hiroharu Kawasaki
Choong-Rae Cho
A.M. Grishin
K V Rao

Titanium cal bide (TiC) thin films have been grown on Si (100) substrates using a pulsed neodymium: yttrium-aluminum-garnet (Nd:YAG) laser deposition method. X-ray diffraction (XRD) pattern of the ...

Keywords:

Nd:YAG laser
Titanium
Neodymium
Thin film
X-ray crystallography
Laser
Titanium carbide
Pulsed laser deposition
Analytical chemistry
Physics
Deposition (law)

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