Direct measurement of saturation property of an electron beam pumped KrF laser

The small signal gain coefficient, the saturation intensity, and the absorption coefficient of an electron‐beam pumped KrF laser were measured by a probe laser at pumping rates of 0.9−1.5 MW/cm3 and pressures of 1140−1900 torr. Half reduction of the absorption coefficient was observed at the probe laser intensity of more than the saturation intensity. The experimental data was compared with a laser kinetic simulation and good agreement was observed.