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1410 Model of titanium nitride coatings by thermal chemical vapor deposition
1410 Model of titanium nitride coatings by thermal chemical vapor deposition
2011
Hiroki Takemoto
Ken Ichiro Tanoue
Tatsuo Nishimura
Shigeharu Souma
Syamim Anas
Keywords:
Chemical vapor deposition
Hybrid physical-chemical vapor deposition
Ion plating
Thin film
Physical vapor deposition
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Plasma-enhanced chemical vapor deposition
Materials science
Inorganic chemistry
Chemical engineering
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