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Thermodynamic Analysis of Preparation of SiBCN Films Using a Trimethylaminoborane–Tetramethyldisilazane Gas Mixture
Thermodynamic Analysis of Preparation of SiBCN Films Using a Trimethylaminoborane–Tetramethyldisilazane Gas Mixture
2021
V. A. Shestakov
M. L. Kosinova
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