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Modeling of non-local and local behavior of EEDF in argon and silane discharges
Modeling of non-local and local behavior of EEDF in argon and silane discharges
1999
M. Yan
Annemie Bogaerts
Wim Goedheer
Renaat Gijbels
Keywords:
Silane
Argon
Atomic physics
non local
Materials science
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