Dveloppement humain et loi log-priodique

A cerium oxide slurry for polishing comprising cerium oxide dispersed in water, wherein the slurry has a conductivity of about 30 c muS/cm or less when the cerium oxide concentration in the slurry is c wt. %. In order to adjust the conductivity to about 30 c muS/cm or less, cerium oxide is washed with deionized water.