High frequency power supply arrangement, in particular a plasma supply device and methods of operating a high frequency power supply arrangement
2008
Having high-frequency power supply arrangement, in particular plasma supply device for generating an output power> 1 kW at a fundamental frequency> 3 MHz with at least one contact bridge (100), the two series-connected switching elements (1, 2), one of said switching elements (1) on a is driven is located in the operation changing reference potential, and a driver (12), said driver (12) having a differential input with two signal inputs (14, 15) and is connected to the changing in operation reference potential and a control voltage source (5) is provided, which via a signal transformer (16) is connected to a driver (12) having driver circuit.
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