P-23: Thin Durable Metal Substrates for High-Resolution a-Si TFT Active Matrix Displays

We have developed thin, durable and flexible, metal substrates for a-Si TFT active matrix displays. Fine-patterned a-Si TFTs can be fabricated using an Fe-Ni 42 alloy metal foil with a low coefficient of thermal expansion as the flexible substrate. The metal foil is coated using a heat-resistant polymer passivation layer, so that a conventional a-Si TFT process, where the maximum substrate temperature is 300 °C, can be applied. A 0.29mm-thick 200ppi 4″ VGA reflective LCD panel was realized using a 0.16mm thick metal substrate.