Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry

We present a ray-tracing-based method for simulation of interference fringe patterns (IFPs) for measuring gear tooth flanks with a two-path interferometer. This simulation method involves two steps. In the first step, the profile of an IFP is achieved by means of ray tracing within the object path of the interferometer. In the second step, the profile of an IFP is filled with interference fringes, according to a set of functions from an optical path length to a fringe gray level. To examine the correctness of this simulation method, simulations are performed for two spur involute gears, and the simulated IFPs are verified by experiments using the actual two-path interferometer built on an optical platform.