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MEMS-based Pt-PtRh film temperature sensor on alumina substrate
MEMS-based Pt-PtRh film temperature sensor on alumina substrate
2016
Jiubin Zhang
Ping Cheng
Congchun Zhang
Guifu Ding
Franklin Li Duan
Jing Shao
Qiang Wang
Keywords:
Substrate (chemistry)
Film temperature
Microelectromechanical systems
Materials science
Composite material
Optoelectronics
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