An automatic size measuring algorithm for SEM

The SEM is a useful piece of equipment for measurement in the micro-nano region. In general, it has been usefully applied to measuring the shapes and properties of measurement specimens, but it has limitations in terms of its capacity to precisely measure size. In addition, an SEM may obtain different measurement results for the same specimen depending on the user. In this paper, an algorithm for automatic size measurement of electron beam images was proposed that uses an image processing technique. The experiment was performed on circular and rectangular shapes with diameters and widths ranging from 300 nm to 10 mm. Finally, the results were compared with the values measured by AFM equipment to verify the accuracy of the automatic size measurement.