The influence of the metal film, placed close to the free side of the piezoelectric lateral electric field excited resonator, on its characteristics

Abstract The influence of the width of the gap between the free side of the piezoelectric lateral electric field excited resonator and the metal film placed on the dielectric plate on the frequencies of the parallel and series resonances was experimentally and theoretically studied. The measurements were carried out in the temperature range of 14–45 °C. It has been shown that the change of the gap width from 0 up to 3.5 mm leads to the change of the parallel resonant frequency on 1.3% at the constant temperature. At the same conditions the change of the series resonant frequency does not exceed 0.07%. Theoretical analysis quantitatively confirmed the experimental dependencies of the aforementioned frequencies on the gap width at the room temperature. At that the maximum difference between the theoretical and experimental values of the parallel and series resonant frequencies in all cases does not exceed 1.2%. The obtained results may be used as the basis for the development of the sensors for the measurement of the displacement in the interval of 0.2–2 mm in the temperature range of 15–45 °C.