Electro-optical properties of diamond thin films as UV photodetectors

Abstract Optoelectronic properties of CVD-diamond thin films grown on silicon have been investigated in order to study the applications of diamond as active material for UV and soft X-ray photodetectors. A comparison of electrical and photoelectrical properties between diamond films grown by hot filament and microwave plasma enhanced CVD techniques is reported, discussing the role of the film morphology and the device geometry.