Thermal model for a microhot plate used in a MEM gas sensor

M. Alfredo Reyes-Barranca,José Luis González-Vidal,A Tavira-Fuentes

Thermal model for a microhot plate used in a MEM gas sensor

2008

M. Alfredo Reyes-Barranca
José Luis González-Vidal
A Tavira-Fuentes

Resumen en: A thermal analytical model for a MEM gas sensor is presented and compared with an electrical circuit equivalent model. The objective is to study the temp...

Keywords:

Thermodynamics
Thermal
Mathematics
Electrical network
Microelectromechanical systems
Thermal conductivity
Mathematical analysis
Mechanics
thermal model
equivalent model

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