Microfabrication of wideband distributed beam amplifiers at 220 GHz

Colin D. Joye,J.P. Calame,Khanh T. Nguyen,Dean E. Pershing,Paul B. Larsen,M. Garven,D. Park,R. Bass,Baruch Levush

Microfabrication of wideband distributed beam amplifiers at 220 GHz

2011

Colin D. Joye
J.P. Calame
Khanh T. Nguyen
Dean E. Pershing
Paul B. Larsen
M. Garven
D. Park
R. Bass
Baruch Levush

Wideband, distributed beam amplifiers are under development at NRL. We report on microfabrication techniques used to construct several types of millimeter wave planar amplifier circuits using Ultraviolet Lithography (UV-LIGA).

Keywords:

Optics
Electronic circuit
Amplifier
Wideband
Extremely high frequency
Microfabrication
Physics
Resist
Electronic engineering
Beam (structure)
Distributed amplifier
Lithography
Optoelectronics

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