Electric field and induced charges distribution model for MEMS strip-type sensing electrodes

Strip-type sensing electrodes are often used in MEMS sensors and actuators, such as micro gyroscope, accelerometers, electrometers and electric field sensors. To achieve good performance and optimize the parameters of the electrostatically driven sensors, it is important to simulate and calculate the electric force/field of the driven/sensing electrodes. This paper for the first time presents the theoretical derivation model of the electric field distribution and induced charges for the strip-type sensing electrodes. Based on Schwarz-Christoffel transformation method, the exact solution of electric field and charges distributions are calculated. The matching comparison results between the calculation and the simulation indicate good validity of the proposed model. Furthermore, experimental results show that the response of the sensor is in good accordance with the theoretical calculation within the range from 0 to 50 kV/m.