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Differential Pressure Sensor With Micromachined Overrange Protectors
Differential Pressure Sensor With Micromachined Overrange Protectors
1995
Tetsuya Watanabe
S. Fukuhara
H. Tsukamoto
Takahiro Kudo
Kyoichi Ikeda
Keywords:
Electrode
Surface micromachining
Pressure sensor
Electronic engineering
Silicon
Materials science
Optoelectronics
Correction
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