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Study of electronegative gas effect in beam induced plasma
Study of electronegative gas effect in beam induced plasma
2012
M. Leonova
M. Chung
M.G. Collura
M.R. Jana
Alfred Moretti
Milorad Popovic
T. Schwarz
A. Tollestrup
K. Yonehara
R.P. Johnson
G. Franagan
M. Notani
B. Freemire
Yagmur Torun
P. M. Hanlet
Keywords:
Materials science
Plasma
Atomic physics
Beam (structure)
Correction
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