Integrated magnetic suspension coarse and fine moving mask table driven by planar motor

An integrated magnetic suspension coarse and fine moving mask table driven by a planar motor comprises an integrated coarse and fine moving mask table movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system. The vibration isolation system (500) is located between the balance mass (200) and the base (001), and the mask plate (101) is mounted on the integrated coarse and fine moving mask table movable platform (100). The drive motor of the mask table movable platform (100) is a moving-iron type planar motor (300), a rotor (301) of the planar motor is a permanent magnet array mounted on a top surface of the integrated coarse and fine moving mask table movable platform (100), and a stator (302) of the planar motor is a coil array mounted on the balance mass (200). The integrated magnetic suspension coarse and fine moving mask table driven by the planar motor can lower the design complexity of the drive motor of the mask table movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the integrated coarse and fine moving mask table movable platform is more compact, the inherent frequency and the control bandwidth of the integrated coarse and fine moving mask table movable platform are improved, and thus control precision is improved.