电子束物理气相沉积(EB-PVD)技术研究及应用进展

The recent research and application evolvement of electron beam physical vapor deposition (EB-PVD) technology are reviewed in this paper. Some key points with emphasis on the main technological parameters(such as evaporation temperature, gas pressure, rate of evaporation and coacervation. heating-up temperature and so on) in progress and the formative mechanism of microstructure of supper-alloy sheet prepared by EB-PVD are expounded.