High numerical aperture hemisphere solid immersion lens made of KTaO3 with wide thickness tolerance

2007 
The hemisphere type SIL of KTaO3 that has a high refractive index was developed. NA 1.84 was achieved by the hemisphere SIL of KTaO3 that has a wide thickness tolerance in combination with a high NA aspherical lens of NA 0.77. Huge capacities ROM of 50-100 GB were evaluated by means of KTaO3 hemisphere SIL. The same playback performance as that of LAH79 SIL was confirmed.© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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