Effect of reannealing treatment in alternating electric field on residual strain in sol-gel derived Pb(Zr,Ti)O3 film

Abstract Highly (100)-oriented Pb(Zr,Ti)O 3 film was prepared on Pt/Ti/SiO 2 /Si by sol–gel route. An alternating electric field normal to the film surface was in situ applied to the as-crystallized Pb(Zr,Ti)O 3 film during the reannealing treatment, and its effect on the residual strain of the film was investigated by X-ray diffraction. X-ray diffraction measurement shows that the reannealing treatment in alternating electric field has an obvious influence on the reduction of residual strain in the Pb(Zr,Ti)O 3 film and platinized silicon substrate. With increase of reannealing treatment temperature in alternating electric field, the reduction of strain in the film increases.