A method for improving the beam quality of a gas discharge laser with optimized cooling and gas discharge laser system

A method for improving the beam quality of a gas discharge laser, the laser gas in a gas space (10) is circulated, wherein the laser gas to its temperature of heat exchange surfaces (32) of a through which a temperature control medium Temperiermittelfuhrung (30) in the gas chamber (10) is guided along, wherein the temperature of the laser gas is regulated as a control variable of a control circuit during the blasting operation, characterized, that the inlet temperature of the Temperiermittelfuhrung (30) by flowing a constant volume flow temperature control medium is the manipulated variable of the control loop.