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Front‐End‐of‐Line Integration of Graphene Oxide for Graphene‐Based Electrical Platforms
Front‐End‐of‐Line Integration of Graphene Oxide for Graphene‐Based Electrical Platforms
2018
Xiaoling Lu
Walid-Madhat Munief
Florian Heib
Michael Schmitt
Anette Britz
Samuel Grandthyl
Frank Müller
Jens-Uwe Neurohr
Karin Jacobs
Hadj-Mohamed Benia
Ruben Lanche
Vivek Pachauri
Rolf Hempelmann
Sven Ingebrandt
Keywords:
Graphene
Oxide
Lithography
Front end of line
Electronic engineering
Materials science
Optoelectronics
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