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Influence of Isothermal Hydrogen Annealing on Electrical Properties of Polycrystalline-Silicon Films.
Influence of Isothermal Hydrogen Annealing on Electrical Properties of Polycrystalline-Silicon Films.
1986
C. Y. Lu
N. S. Tsai
Keywords:
Polycrystalline silicon
Hydrogen
Isothermal process
Chemical engineering
Annealing (metallurgy)
Chemistry
Inorganic chemistry
hydrogen annealing
Correction
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