Old Web
English
Sign In
Acemap
>
Paper
>
Microstructural Evolution of Cu Thin Film on the Nano-Thin TaNx/Oxygen Stuffed TaNx Structure
Microstructural Evolution of Cu Thin Film on the Nano-Thin TaNx/Oxygen Stuffed TaNx Structure
2016
Nam Minwoo
Choi EunMi
Kim Areum
Kang Keunwon
Zheng Longshou
Kwon Soon Hyeong
Kim Soo-Kil
Hahn Sang June
Yun Ju-Young
Pyo Sung Gyu
Keywords:
Thin film
Oxygen
Nano-
Materials science
Inorganic chemistry
Metallurgy
microstructural evolution
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
1
Citations
NaN
KQI
[]