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Stacked Capacitor in Trench Cell for 16M-DRAM
Stacked Capacitor in Trench Cell for 16M-DRAM
1989
Kusters
DoThanh
Stelz
Kellner
Mühlhoff
Muller
Keywords:
Optoelectronics
Logic gate
Dram
Trench
random access memory
Materials science
Silicon
Capacitor
Correction
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