Heating and cooling method of the object

PROBLEM TO BE SOLVED: To provide a method for heating or cooling an object to be treated, which can almost uniformly heat the object to be treated, without breaking the object to be treated, particularly in vacuum treatment equipment. SOLUTION: A substrate W is electrostatically attracted by applying a predetermined voltage between a pair of positive and negative attraction electrodes 14a-14d provided on a substrate stage 2, and heated or cooled to a predetermined temperature by heating or cooling means incorporated in the substrate stage 2. The applied voltage of the attraction electrodes is changed to a triangular pulse by the time the temperature of the substrate reaches the predetermined temperature, and the attraction electrodes and an object to be treated are substantially separated from each other when the applied voltage becomes low. COPYRIGHT: (C)2012,JPO&INPIT