Control of ridge shape for the formation of nanometer-scale GaAs ridge quantum wires by molecular beam epitaxy

Abstract We have investigated the molecular beam epitaxial (MBE) growth mechanisms of nanometer scale GaAs ridge structures formed on patterned substrates and studied the way to control the widths of ridges and those of quantum wires grown on them. It is found that the width of the ridge structure decreases, as the growth temperature is reduced, reaching about 20 nm when grown below 580°C. The width of an AlAs ridge (10 nm at 570°C) is always found to be narrower than that of GaAs. A Monte Carlo simulation is performed to investigate the diffusion process of atoms in these ridge structures and indicates the important role of thermodynamical stability on the shape of a nanometer structure.