Calculation of Magnetic Field in the Reactor of RF Magnetized Plasma
2016
In this paper, we present an analytical method for calculating the axial and radial components of the magnetic field created by a permanent magnet in the form of a ring used in a magnetron radio frequency (RF) reactor. The calculation is based on the symmetric integral of the first kind; it was performed under a Linux 64-bit operating system. This analytical method allows us to accurately assess the magnetic field, and it allows us to reduce the computational time. Finally, in order to validate the results, they are successfully compared with the results obtained by a numerical method based on finite-difference method.
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