Design and fabrication Technology for a Twin-Guide SOA Concept on InP membranes

Abstract: In this contribution we present a novel concept of a twin-guide SOA design based on the "InP membrane on Si" (IMOS) platform. As a fundamental device, this SOA design can be used for lasers with current injection and photodetectors under reverse bias in the IMOS platform. The fabrication scheme is presented in detail and the current fabrication progress will be shown.