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Ta/Al₂O₃ MOSFETの反転層電子濃度の解析 (特集 電気関係学会関西連合大会)
Ta/Al₂O₃ MOSFETの反転層電子濃度の解析 (特集 電気関係学会関西連合大会)
2016
daiki fuzimoto
akira hiroki
tuozhenpianye
Keywords:
High-κ dielectric
Metal gate
Condensed matter physics
MOSFET
Physics
electron density distribution
Correction
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