Ultrathin sensitive beam piezoresistance acceleration transducer
2011
The invention relates to an ultrathin sensitive beam piezoresistance acceleration transducer. The ultrathin sensitive beam piezoresistance acceleration transducer is characterized by mainly comprising a silicon based frame, a mass block, main beams and micro beams, wherein the mass block is arranged in the silicon substrate frame, the silicon base frame is connected with the mass block by virtue of the main beams and the micro beams, micro beams which are mutually symmetric are arranged at the two sides of the mass block, each micro beam is provided with a strain resistor, symmetric main beams are arranged at four corners or the four corners and the middle part at the two sides of the mass block, which are provided with no micro beam, one end of each main beam is connected with the mass block, the other end of each main beam is connected with the silicon substrate frame; by adopting the symmetric structure, sensitivity and temperature stability of the piezoresistance type acceleration transducer can be improved, thus micro beams move in horizontal direction only and do not twist under the action of acceleration; strain distribution is uniform, position accuracy requirement is low, and the ultrathin sensitive beam piezoresistance acceleration transducer is easy to implement and can be widely applied to the field of acceleration measurement and control.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI