Measurement system for thin-film material tension-compression fatigue dynamic loading

The invention discloses a measurement system for thin-film material tension-compression fatigue dynamic loading. The measurement system comprises a dynamic loading device, wherein the dynamic loading device is placed on a three-dimensional precision translation stage below an optical microscope, and a CCD (Charge-Coupled Device) camera is installed at the upper end of an eyepiece of the optical microscope. According to the measurement system, a dual-system tensile device consisting of a stepping motor and piezoelectric ceramic can be used for realizing the integration of large displacement and high precision, and can be used for directly carrying out static and dynamic loading of a thin-film material and observing the surface morphology changes of the thin film in real time in the loading process so as to realize the non-contact local strain measurement. The measurement system is compact in structure and convenient to use.