Efficient modeling of a biaxial micromirror with decoupled mechanism

This paper presents the design methodology of the biaxial micromirror. Firstly, the robotic theory is utilized to derive the general decoupling structural dynamics, which further lead to the formation of the mirror components in the example structure. Then, in regard to the chosen square shape mirror plate, the quartet triangles are selected as the four electrodes with a unique distribution, which extends the decoupled mechanism into the electromechanical domain so that the entire system can be analyzed by using the design theory of single axis mirrors. The pull-in characteristics are further derived and the design performance indices explicitly link with the critical geometrical parameters. For the first time insights are provided for the design synthesis of biaxial micromirror. In addition, the simple analytical approach developed for this case is found to be effective and the results match well with those from the finite element method (FEM) simulation. Using this analytical approach to obtain the initial geometrical parameters can significantly reduce the design efforts, since the numerical FEM simulation only serves for verification and fine-tuning.