BROADBAND DESIGN OF RF MEMS SPDT SWITCH

This paper describes a broadband single pole double throw (SPDT) switch in the range of DC to 18 GHz. The switch consists of cascade cantilever type ohmic series switch connected through bias lines. Electrodes below the cantilever are used to toggle the switch between open and closed position. Simulated electromechanical response of the single switch and rf performance of the SPDT switch are presented. The SPDT switch provides an insertion loss -0.4 dB, return loss -16dB and isolation better than -39 dB over the full frequency band.