Multi-chamber system

PURPOSE: To provide a load locking device, in which the intrusion of impurities to a process chamber is reduced while space efficiency is improved and cost is reduced, by decreasing the number of the use of coupling ports for carrying a member to be treated out from and into a carrier member in a multi-chamber system while miniaturizing a load locking chamber. CONSTITUTION: Process chambers 9, 10 are coupled to coupling ports 2b, 2f formed to a carrier chamber 2 having a conveyor system 2x on the inside, buffer chambers 11, 12 combined with conveyor lines 13, 14 in a housing are coupled with coupling ports 2c, 2e, and only a load locking chamber 16 being required for carrying out and in a member to be treated at an item unit by a loader 17 and having a small volume is coupled to a coupling port 2d. COPYRIGHT: (C)1993,JPO&Japio