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Growth and Physical Properties of LPCVD Polycrystalline SiOx Films.
Growth and Physical Properties of LPCVD Polycrystalline SiOx Films.
1986
A. E. Widmer
G. Harbeke
L. Krausbauer
E. F. Steigmeier
Keywords:
Crystallite
Chemical engineering
Chemical vapor deposition
Chemistry
Inorganic chemistry
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