Piezo actuators and piezo motors for driving systems

The problem of creation of piezo actuators and piezo motors for nano- and micropositioning is considered. The analysis of the market for piezo actuators and piezo motors is done, the main types of piezo actuators, widely spread in the world, are defined. The original design of stepper piezo motors for nano- and micropositioning is described. The research tasks concerning the development and improvement of piezo actuators and piezo motors are summarized.