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Monte-carlo based optical proximity correction of DRAM storage capacitors and hammer heads
Monte-carlo based optical proximity correction of DRAM storage capacitors and hammer heads
2002
Jong-Sun Kim
Ki-Chon Park
Young Dong Kim
Yong Ho Oh
Jai-Cheol Lee
Chun-Soo Go
Sungwoo Lim
Keywords:
Physics
Nuclear magnetic resonance
Capacitor
Hammer
Optical proximity correction
Monte Carlo method
Electronic engineering
Dram
Computational physics
Condensed matter physics
Correction
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