ZrO2/SiO2 Fine Particle Synthesis by MOCVD

Binary ZrO2/SiO2 fine particles are synthesized by simultaneous decomposition of zirconium tetra-tert-butoxide and tetraethyl orthosilicate in an externally heated tube flow reactor under an oxidizing atmosphere. Particle production and characteristics are studied in relation to dependence on the geometry of the inlet section arrangement, chemistry of precursor decomposition, precursor concentration, and reactor flow rate. Particle production is monitored by scanning mobility particle sizer (SMPS), the morphology of particles by scanning/transmission electron microscopy (SEM/TEM), crystallinity by X-ray diffraction (XRD) and selected area electron diffraction (SAED), and composition of particles by electron dispersive spectroscopy (EDS). Particle production and their properties can be significantly affected by the geometry of the reactor inlet.