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Highly Sensitive MOSFET Gas Sensors with Porous Platinum Gate Electrode
Highly Sensitive MOSFET Gas Sensors with Porous Platinum Gate Electrode
2017
F. Freund
Kunihiro Fujii
Fumio Hasegawa
D. L. Critchlow
Hiroshi Ikeda
Keywords:
Porosity
Electrode
MOSFET
Platinum
Materials science
Electronic engineering
highly sensitive
Optoelectronics
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