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1102 Strength Evaluation of Polycrystalline Silicon Wafer
1102 Strength Evaluation of Polycrystalline Silicon Wafer
2006
Daisuke Echizenya
Hiroo Sakamoto
Syuichi Tani
Hiroaki Morikawa
Keywords:
Polycrystalline silicon
Wafer backgrinding
Monocrystalline silicon
Wafer
Composite material
Materials science
Optoelectronics
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