Theoretical research on structures of aminopyrimidine germanium(II) precursors and their application in film formation

Structures of aminopyrimidine Ge(II) precursors have been elucidated by density functional theory calculations. Calculation data indicated that the structure of aminopyrimidine Ge(II) compounds was four-coordinate with ten electrons. Thin film of Ge was deposited on Si wafer directly by means of home-made equipment and chemical vapor deposition technology. Aminopyrimidine Ge(II) precursors had excellent thermal properties and were suitable for potential membrane materials.