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Stress in Silicon Nitride Films and Its Effect on Boron Diffusion in Silicon
Stress in Silicon Nitride Films and Its Effect on Boron Diffusion in Silicon
1997
Satoshi Matsumoto
K. Osada
Y. Zaitsu
T. Shimizu
Eisuke Arai
Shoichiro Tanigawa
F. Uberti
Keywords:
Inorganic chemistry
Boron
Silicon nitride
Materials science
Monocrystalline silicon
LOCOS
Dislocation
Nanocrystalline silicon
Nitride
Silicon
Metallurgy
Crystallography
Composite material
Stress (mechanics)
Correction
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