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Synthesis of Ti 2 O 3 thin films on 4H-SiC (0001) substrates
Synthesis of Ti 2 O 3 thin films on 4H-SiC (0001) substrates
2021
Satoru Miyazaki
Kohei Yoshimatsu
Naoto Hasegawa
Hiroshi Kumigashira
Keywords:
Metal–insulator transition
Thin film
Materials science
Chemical engineering
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