Old Web
English
Sign In
Acemap
>
Paper
>
Chromium nitride coating by inductively coupled plasma-assisted RF magnetron sputtering
Chromium nitride coating by inductively coupled plasma-assisted RF magnetron sputtering
2006
장호성
김유성
최대한
이재영
최종인
박지혜
최비공
유용주
천희곤
김대일
Keywords:
Sputter deposition
Chromium nitride
Inductively coupled plasma
Analytical chemistry
Coating
Materials science
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]